Sumita Pennathur.Ī free, open-source, and fast/simple CAD tool for mask/reticle layout.
Written by Cherry Gupta, courtesy of Prof. See this L-Edit Tutorial for a good starter guide.provides an academic license for this software (no industrial users!), email to obtain the software. Sophisticated object instantiation and array layout, to reduce files sizes and easily push changes to multiple cells. Use these for designing your lithography mask plates. Example AFM Scan, taken with NanoFab equipment, shared online for interactive analysis (slice, flatten etc.).You can share an interactive 3D render of your AFM or Profilm3D scans with this tool.(Filmetrics) - online analysis/storage/sharing of 3D topographical data and images.Can open Bruker NanoScope files, from the AFM.Sophisticated leveling, slicing, roughness/particulate analysis functions etc.Gwyddion - free analysis software for Atomic Force Microscopes (AFMs) and other 3D data.There are many other useful plugins, for particle counting, creating animations etc.Calibrations in this plugin repository are out of date as of microscope upgrades in 2019.The Microscope Measurement Tools plugin has pre-configured calibrations for NanoFab microscopes & SEMs, and allows you to draw length measurements.FIJI - scientific image anaylsis software.Also available on Nanofiles-SFTP / Manuals / Amscope.AmScope Calibration File containing calibrations for all NanoFab microscopes: Download Here.AmScope Software - microscope image analysis software.Useful for Optical thin-film analysis (ellipsometry/spectroscopic fitting), laser etch monitoring, optical filter/mirror/anti-reflection coating design, photonic devices etc. Optical constants of many common materials. The only thing it's missing is a hyperlinked table of contents. Enormous review of published wet etches of many semiconductors and alloys.Clawson, "Guide to references on III±V semiconductor chemical etching", 2001 This table shows common metals and which Transene etchants they are attacked by/impervious to.Sputter rates of various materials, indicative or hardness and dry etching properties.Useful info about evaporating and sputtering many materials.Kurt J Lesker: Material Deposition Chart.Physical Properties of Semiconductors (Ioffe Institute).Boiling points of various compounds can tell you how volatile an etch product may be in a reactive ion etch, or whether they need to be wet-etched instead.: Film Stress, Ion Implant, Thermal Oxidation, KOH Etching & online curve-fitting.Mean Free Path tables (Pfeiffer Vacuum).This Thermal Ox calculator allows you to tweak the calculation using the Partial Pressure variable, to match your experimental data.Thermal Oxide Calculator (Leland Stanford Jr.).5.2.5.5 Other sources of lithography CAD files.
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